Add to ORKGAbstract—Nonequilibrium effects associated with spatial and temporal nonlocality between electron energy distribution and electromagnetic field in gas discharge plasmas at low gas pressures are reviewed in this paper. Formation of nonequilibrium EEDF is discussed for capacitive and inductive radio-frequency discharges. The possibility of electron temperature control is considered for gas discharge plasmas at nonequilibrium condition. Index Terms—Electron energy distribution function (EEDF), electron kinetics, gas discharge, nonequilibrium. I
This grant has focused on the study of several aspects of electron kinetics in low pressure plasmas....
Non-equilibrium is one of the important features of an atmospheric gas discharge plasma. It involves...
The authors would like to thank the French organizations CEA/DAM for the financial support of the re...
In low-pressure discharges, when the electron mean free path is larger or comparable with the discha...
The effect of density and size of dust grains on the electron energy distribution function (EEDF) in...
Electron temperature is reconsidered for weakly-ionized oxygen and nitrogen plasmas with its dischar...
The wide range of applications of cold plasmas originates from their special characteristi...
Particle in cell (PIC) simulations are employed to investigate the effect of excitation frequency ω ...
In the present paper the influence of non-locality of the electron energy distribution func-tion (EE...
Strong deviations from Maxwellian equilibrium of the electron energy distribution function (EEDF) ar...
The desire for improved control over electric discharge phenomena in a wide variety of scientific, t...
Reliable calculations of the electron/ion energy losses in low-pressure thermally nonequilibrium low...
Purpose was to study equilibrium particle and energy balance and heating mechanisms in electronegati...
Experimental studies of the electron energy distribution function “EEDF” under well defined conditio...
This review gives a classification of the excitation kinetics ruled by electrons in plasmas. It is a...
This grant has focused on the study of several aspects of electron kinetics in low pressure plasmas....
Non-equilibrium is one of the important features of an atmospheric gas discharge plasma. It involves...
The authors would like to thank the French organizations CEA/DAM for the financial support of the re...
In low-pressure discharges, when the electron mean free path is larger or comparable with the discha...
The effect of density and size of dust grains on the electron energy distribution function (EEDF) in...
Electron temperature is reconsidered for weakly-ionized oxygen and nitrogen plasmas with its dischar...
The wide range of applications of cold plasmas originates from their special characteristi...
Particle in cell (PIC) simulations are employed to investigate the effect of excitation frequency ω ...
In the present paper the influence of non-locality of the electron energy distribution func-tion (EE...
Strong deviations from Maxwellian equilibrium of the electron energy distribution function (EEDF) ar...
The desire for improved control over electric discharge phenomena in a wide variety of scientific, t...
Reliable calculations of the electron/ion energy losses in low-pressure thermally nonequilibrium low...
Purpose was to study equilibrium particle and energy balance and heating mechanisms in electronegati...
Experimental studies of the electron energy distribution function “EEDF” under well defined conditio...
This review gives a classification of the excitation kinetics ruled by electrons in plasmas. It is a...
This grant has focused on the study of several aspects of electron kinetics in low pressure plasmas....
Non-equilibrium is one of the important features of an atmospheric gas discharge plasma. It involves...
The authors would like to thank the French organizations CEA/DAM for the financial support of the re...